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MEMS electric field sensors ARE successfully developed by the Institute of Electronics, Chinese Academy of Sciences 

   A series of electric field microsensors based on MEMS (micro-electro-mechanical systems) technologies have been successfully developed by Professor Shanhong Xia’s research group at the State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences. The innovative products include atmospheric electric field microsensor on the ground, balloon-borne atmospheric electric field microsensor, three-dimensional electric field microsensor, and electric field microsensors for smart-grid. The designs of several products have been finalized in September 2013, and the products have been used in various applications.

The new products have the following advantages:

1)      Small size, high spatial resolution, and low power consumption;

2)      No motor wear parts, good stability, and high reliability;

3)      Simultaneous measurement of electrostatic field and alternating electric field;

4)      Can be used for detecting the electric filed at a single point or at multi-points within a region by wireless network.

 

Contacts: Shanhong Xia, Chunrong Peng

Tel:+86-10-58887180, +86-10-58887590

Cell:+86 133-0132-9106, +86 135-2295-2096

Email: shxia@mail.ie.ac.cn, crpeng@mail.ie.ac.cn

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MEMS atmospheric electric field sensor on the ground

1. Introduction

           The atmospheric electric field microsensor on the ground is based on charge induction principle, and made by the advanced MEMS (micro-electro-mechanical systems) technology. The microsensor has small size and low power consumption; moreover, due to no motor wear parts, the microsensor has better stability and higher reliability than traditional field mills. The microsensor is used to measure the ground-atmosphere electric field and its changes, which is particularly useful for lightning hazard warning, smart grid, meteorology, scientific research, etc. 

2.  Technical Data

  • Measurement Range: -50kV/m~+50kV/m (can be extended according to the application)

  • Resolution: 20 V/m

  • Total Uncertainty:  <2%

  • Response Time: 65ms

  • Signal Interface: GPRS/WiFi, optical fiber, RS232/485, network port, etc.

  • Voltage: 220VAC, 50/60Hz; or 6~12VDC

  • Power Consumption: 0.65watts (Voltage: 6VDC)

  • Probe Dimensions: Φ54.5mm×80mm

3.  Features and merits

  • Wide range, fast response;

  • Moisture resistance, good stability, long life, and reliable performance.

  • Small size, high spatial resolution, and low power consumption

  • Can be used for detecting the electric filed at a single point or at multi-points within a region by wireless network.

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MEMS balloon-borne atmospheric electric field sensor

1.  Introduction

         Based on charge induction principle, balloon-borne atmospheric electric field microsensor has been developed by using advanced MEMS technology. The sensor has significant features such as small size, light weight, low consumption and convenience operating. The sensor can measure the electric field and its changes from the ground to the high attitude, which is particularly useful for meteorological sounding, lightning hazard warning, atmospheric electricity research, etc. The sensor can be used independently or assembly with sonde, suitable for balloon-borne, airborne and rocket-borne platforms.

2.  Technical Data

  • Measurement Range: -100kV/m~+100kV/m

  • Sounding altitude: Ground~30km

  • Resolution: 50 V/m

  • Total Uncertainty: < 3%

  • Response Time: 66ms

  • Signal Interface: RS232, voltage, frequency

  • Voltage: 6~10VDC

  • Power Consumption: 0.6watts (Voltage: 6VDC)

  • Weight: 87g(not including batteries)

  • Probe Dimensions: Φ26mm×22mm

3.  Features and merits

  • Wide range, fast response;

  • Small size, light weight, low consumption, easy integration;

  • Reliable performance, good stability, high environmental adaptability;

  • Output interfaces: RS232, voltage, frequency, etc.

  • Suitable for L band radar, altometer, flying control, etc.

  • Convenient usage.

 

 

 

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MEMS three-dimensional electric field sensor

1.  Introduction

            Based on charge induction principle, the three-dimensional electric field sensor has been developed by using advanced MEMS technology. The sensor has significant features such as small size and high spatial resolution. The sensor can measure the three components of the vector electric field and its changes, which is particularly useful for smart grid, lightning hazard warning, meteorology, scientific research, etc. The sensor can be used independently or assembly with sonde, meteorological station.

2.  Technical Data

  • Measurement Range: -50kV/m~+50kV/m,can be extended according to the application

  • Resolution: 50V/m (X/Y/Z orientation)

  • Total Uncertainty: < 3% (X/Y/Z orientation)

  • Response Time: 81ms

  • Signal Interface: RS232/485,WiFi, optical fiber, etc.

  • Voltage: 6~12VDC

  • Power Consumption: 0.66watts (Voltage: 6VDC)

  • Weight: 211g

  • Probe Dimensions: 33mm×33mm×42mm

3.   Features and merits

  • Wide range, fast response;

  • High environment adaptability, good stability, reliable performance and long life;

  • Small size, high spatial resolution;

  • Low power consumption, easy integration;

  • Can be used for detecting the electric filed at a single point or at multi-points within a region by wireless network.

   

 

 

 

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MEMS electric field sensor for smart grid

1.   Introduction

           In order to meet the needs of smart grid applications, based on charge induction principle, non-contact MEMS (micro-electro-mechanical systems) AC/DC field (voltage) sensors, insulator defect detection sensors and other products have been developed by using advanced MEMS technology. The developed sensors have been used in various applications, access to the users’ praise.

2.   Technical Data

  • Measurement Range: ±100kV/m(DC)、0~100kV/m(AC),can be extended according to the application

  • Resolution: 20V/m(DC electric field)、10V/m (AC electric field)

  • Linearity: < 2%

  • Signal Interface: RS232, WiFi, optical fiber, etc.

  • Voltage: 6~12VDC (can be adjusted according to the application)

  • Probe Dimensions: Φ18mm×78mm

  • Suitable for DC, AC and AC-DC hybrid high voltage lines

3.   Features and merits

  • Simultaneous measurement of AC and DC electric field/voltage.

  • Non-contact measurement, good security.

  • Strong environmental adaptability, good stability, high reliability, high precision, and long life.

  • Low power consumption, small size, high spatial resolution, and small electric field measurement distortion.

   

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