| Preliminary Program | |||||
| SATURDAY, JUNE 4 | 14:00 - 18:00 | Tutorial Registration | |||
| SUNDAY, JUNE 5 | 07:30 - 09:00 | Tutorial Registration | |||
| 09:00 - 12:00 | Morning Short Courses | ||||
| 12:00 - 14:00 | Lunch | ||||
| 14:00 - 17:00 | Afternoon Short Courses | ||||
| 16:00 - 20:00 | Registration | ||||
| 18:00 - 20:00 | Welcome Reception | ||||
| MONDAY, JUNE 6 | 07:30 - 18:00 | Registration | |||
| 08:30 - 09:45 | Opening Ceremony & 30 Years' Anniversary | ||||
| 09:45 - 10:25 | Plenary I - Prof. Hiroyuki Fujita, University of Tokyo, Japan | ||||
| 10:25 - 10:55 | Break and Exhibit Inspection | ||||
| 10:55 - 11:35 | Plenary II - Prof. Roger T. Howe, Stanford University, USA | ||||
| 11:35 - 12:15 | Plenary III - Prof.-Ing. Roland Zengerle, IMTEK, University of Freiburg, Germany | ||||
| 12:15 - 13:15 | Luncheon | ||||
| 13:15 - 16:15 | Poster Session I | ||||
| 15:45 - 16:15 | Break and Exhibit Inspection | ||||
| 16:15 - 18:00 | Inertial Sensors | Power MEMS | Cell Handling & Analysis | Chemical SensorsⅠ | |
| 18:00 | Adjourn for the Day | ||||
| 18:00 - 20:30 | Evening Reception | ||||
| TUESDAY, JUNE 7 | 08:30 - 10:00 | CMOS-MEMS | RF-MEMS | WET Assembly | Biomolecular Sensing |
| 10:00 - 10:30 | Break and Exhibit Inspection | ||||
| 10:30 - 12:15 | Physical SensorsⅠ | Resonators & Oscillators | Bioprobes & Biodevices | Wafer Level Process | |
| 12:15 - 13:15 | Luncheon | ||||
| 13:15 - 16:15 | Poster Session II | ||||
| 15:45 - 16:15 | Break and Exhibit Inspection | ||||
| 16:15 - 18:00 | Acoustics, Damping and Vibration | Actuators | Nanofabrication & Nanodevices | MicrofluidicsⅠ | |
| 18:00 | Adjourn for the Day | ||||
| WEDNESDAY, JUNE 8 | 08:30 - 10:00 | 3D Integration | Optofluidics | Bioanalysis Tools | Energy Harvesting |
| 10:00 - 10:30 | Break and Exhibit Inspection | ||||
| 10:30 - 12:15 | Materials for Nanodevices | Optics | Biomedical Microdevices | Chemical SensorsⅡ | |
| 12:15 - 13:15 | Luncheon | ||||
| 13:15 - 16:15 | Poster Session III | ||||
| 15:45 - 16:15 | Break and Exhibit Inspection | ||||
| 16:15 - 18:00 | Materials & Photonic Crystals | Materials & Characterization | Nanotubes & Nanowires | Devices for Cells & Microorganisms | |
| 18:00 | Adjourn for the Day | ||||
| 19:00 - 22:00 | Banquet | ||||
| THURSDAY, JUNE 9 | 08:30 - 10:00 | Polymers in MEMS | Wireless Systems & Components | MEMS Gyroscopes | Medical Devices & Systems |
| 10:00 - 10:30 | Break and Exhibit Inspection | ||||
| 10:30 - 12:15 | Physical SensorsⅡ | Harsh Environmental Reliability | Displays, Scaners and Modulators | MicrofluidicsⅡ | |
| 12:15 - 13:15 | Conference Adjourns / Luncheon | ||||
| 13:30 - 17:00 | Technical Tour | ||||