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Plenary Speakers
Prof. Hiroyuki Fujita - University of Tokyo, Japan
New Trends of MEMS/NEMS based on Heterogeneous Process Integration - Towards Life/Green Innovation |
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Prof. Roger T. Howe - Stanford University, USA
Vacuum Microsystems for Energy Conversion and other Applications |
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Prof.-Ing. Roland Zengerle - IMTEK, University of Freiburg, Germany
Microfluidic Platforms for Miniaturization, Integration, Automation and Parallelization of Tests on Commercially Available Instruments |
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Final Program